C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality StdPbc-1015 SEMI D5 — Standard Size

Name: C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality StdPbc-1015 SEMI D5 — Standard Size
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Description

SEMI D5 — Standard Size for Flat Panel Display Substrates

org in July 2003

NOTICE: This Document was balloted and approved for withdrawal in 2011

specifications

on the other hand

C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality StdPbc-1015 SEMI D5 — Standard SizeThe purpose of this Document is to provide specification for chlorine (Cl2) that is used in the semiconductor industry. This Document covers requirements for chlorine used in the semiconductor industry. Referenced SEMI Standards None.

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