E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle Revision:SEMI E143-0306 (Reapproved 0518) - Superseded SEMI E39 — Specification for

SEMI E39 — Specification for Object Services Standard (OSS)

1  This Standard applies to data collection related to the portion of equipment recipe execution that directly affects the processing locations (process modules and process areas) within production equipment

org in February 2000

Electrostatic discharge (ESD) damages both products and reticles

Establishing

E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle Revision:SEMI E143-0306 (Reapproved 0518) - Superseded SEMI E39 — Specification forThe purpose of this Test Method is to provide an accurate method for measuring the output power and spectral content of radio frequency (RF) generators being driven into both matched and mismatched loads to simulate their actual performance in RF power delivery systems for semiconductor processing equipment to support SEMI E113. This Test Method specifies the testing procedures and test equipment required for precisely determining the output power and