C00327 - SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様 Revision:SEMI C3.27-1102 (Reapproved 1011) - Superseded These guidelines should be applied

These guidelines should be applied to any XML document or schema generated as part of a SEMI Standard for communication between software entities

システム中にあるマテリアルについてその所在位置およびその搬送履歴を記録し報告する。

SEMI G96-0126 (technical revision)

the result of a given population of measurements

SEMI E142-0706 (technical revision)

C00327 - SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様 Revision:SEMI C3.27-1102 (Reapproved 1011) - Superseded These guidelines should be appliedglobal Gases Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org1984200211 : (Si2H6) Referenced SEMI Standards SEMI C1 Specifications for Reagents SEMI C3 Specifications for Gases