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Although the scope of SEMI S3 is PLHS
Parameters and Range of Performance
nondestructive measurement of waviness of clean CSW used for manufacturing semiconductor devices
This guideline is intended to be applicable for electron beam processes
and wafer to wafer stacking
E04800 - SEMI E48 - SMIFインデクサ用空間のための仕様 StdPbc-312 Although the scope of SEMINOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Physical Interfaces & Carriers Global Technical CommitteeEuropean Equipment Automation Committee2001424European Regional Standards Committee20018www. semi. org200111199520017 SMIF (SMIF) SEMI E19 Referenced SEMI Standards SEMI E15