F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 Revision:SEMI F21-1102 - Superseded This Guide provides a framework

This Guide provides a framework for reporting of nanotopography surface features on silicon wafers

It assumes that some of the critical trace contaminants (i

Only the ability to describe the fact that a supplier has implemented such a concept and that a Client can discover this implementation and any data it can produce is in scope for this Specification

orgで入手可能となる。初版は2006年3月発行。

Two types of test methods are covered as follows:

F02100 - SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類 Revision:SEMI F21-1102 - Superseded This Guide provides a frameworkNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Facilities CommitteeNorth American Facilities Committee2002829 North American Regional Standards Committee20029www. semi. org2002111995 1 Referenced SEMI Standards None.